Sensing Characterization of Metal Oxide Semiconductor-Based Sensor Arrays for Gas Mixtures in Air

Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NOx), ammonia (NH3), and formaldehyde (HCHO), as well binary mixed-gas systems. Four sensing materials different target gases, Pd-SnO2 CO, In2O3 NOx, Ru-WO3 NH3, SnO2-ZnO HCHO, synthesized using a sol-gel method, then fabricated micro platform. The behavior response to mixture examined six mixed systems experimental data in MEMS arrays sole gases their mixtures. with system suggests that specific adsorption selective activation sites might occur mixtures, allow selectivity particular gas. careful pattern recognition obtained by array made it possible distinguish species from measure its concentration.